Invention Grant
- Patent Title: Structure and formation method of semiconductor device structure with gate structure
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Application No.: US15429797Application Date: 2017-02-10
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Publication No.: US10707316B2Publication Date: 2020-07-07
- Inventor: Yi-Ching Huang , Tsung-Yu Chiang
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsinchu
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsinchu
- Agency: Birch, Stewart, Kolasch & Birch, LLP
- Main IPC: H01L21/28
- IPC: H01L21/28 ; H01L29/423 ; H01L27/088 ; H01L21/8234 ; H01L29/66 ; H01L29/49 ; H01L29/78

Abstract:
Structures and formation methods of a semiconductor device structure are provided. The semiconductor device structure includes a substrate, a dielectric layer over the substrate, a first metal gate structure in the dielectric layer and having a first width and a second metal gate structure in the dielectric layer and having a second width. The first metal gate structure includes a first metal electrode, and the second metal gate structure includes a second metal electrode. The second metal electrode includes a first conductive portion having a third width and a second conductive portion over the first conductive portion and having a fourth width. The fourth width is greater than the third width. The semiconductor device structure also includes two first source/drain portions at opposite sides of the first metal gate structure, and two second source/drain portions at opposite sides of the second metal gate structure.
Public/Granted literature
- US20180166548A1 STRUCTURE AND FORMATION METHOD OF SEMICONDUCTOR DEVICE STRUCTURE WITH GATE STRUCTURE Public/Granted day:2018-06-14
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