MRAM structure for efficient manufacturability
Abstract:
A semiconductor device comprises a first conductive material, a contact, an a magnetic tunneling junction positioned between the first conductive material and the contact. The semiconductor device further comprises a spacer that is positioned between the first conductive material and the contact and surrounds at least a portion of the magnetic tunneling junction. The spacer comprises spacer material that has at least some etch selectivity compared to a dielectric material that surrounds at least a portion of the first conductive material.
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