A method of producing a monolithically integrated high energy density solid-state battery device. The method can include positioning a substrate and depositing one or more stacked monolithically integrated high energy density solid-state electrochemical cells in series or in parallel configurations sequentially or individually. Each of these cells can have a first barrier layer, a cathode current collector deposited overlying the first barrier layer, a cathode overlying the electrically conductive layer, an anode, an anode current collector deposited overlying the solid state layer of negative electrode material, and a second barrier layer. The method can also include rapidly heating the one or more stacked cells to a target temperature for at least 60 minutes, and connecting and terminating the one or more stacked monolithically integrated high energy density solid-state electrochemical cells electrically in series or in parallel, to from a monolithically integrated high energy density solid-state battery device.