Invention Grant
- Patent Title: Method for manufacturing elastic wave device, and elastic wave device
-
Application No.: US15622105Application Date: 2017-06-14
-
Publication No.: US10707825B2Publication Date: 2020-07-07
- Inventor: Takashi Iwamoto
- Applicant: Murata Manufacturing Co., Ltd.
- Applicant Address: JP Kyoto
- Assignee: MURATA MANUFACTURING CO., LTD.
- Current Assignee: MURATA MANUFACTURING CO., LTD.
- Current Assignee Address: JP Kyoto
- Agency: Keating & Bennett, LLP
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@3f1a9d40
- Main IPC: H03H9/145
- IPC: H03H9/145 ; H03H3/08 ; H03H9/64 ; H03H9/72

Abstract:
A method for manufacturing an elastic wave device includes successively stacking conductive films on a piezoelectric substrate on which a pattern of a first resist has been formed, removing the first resist from the piezoelectric substrate on which the conductive films have been stacked; applying a second resist to the piezoelectric substrate from which the first resist has been removed and subjecting the second resist to exposure and development, thus forming a protective layer that protects a first region with the second resist, and etching the second conductive material in a state in which the first region is protected by the protective layer.
Public/Granted literature
- US20170279429A1 METHOD FOR MANUFACTURING ELASTIC WAVE DEVICE, AND ELASTIC WAVE DEVICE Public/Granted day:2017-09-28
Information query
IPC分类: