Invention Grant
- Patent Title: Thin film analysis apparatus and method for a curved surface
-
Application No.: US16209873Application Date: 2018-12-04
-
Publication No.: US10709327B2Publication Date: 2020-07-14
- Inventor: Aizhong Zhang
- Applicant: Aizhong Zhang
- Agent Lynne M. Blank, Esq
- Main IPC: G01N21/21
- IPC: G01N21/21 ; A61B3/10 ; A61B3/15 ; A61B3/00 ; G01B11/06 ; G02B27/14 ; G01N21/41 ; G01N21/84

Abstract:
A thin film analysis apparatus and method for a curved surface is disclosed. The apparatus includes an illuminator, a sample, an imaging group, one or more beamsplitters, optional focusing groups, polarization analyzers, detectors and optional display and analysis systems. The image series are recorded, preferably substantially synchronously. The system can be calibrated by as few as one reference phantom that has the same or substantially similar geometry as the sample under test. Based on calibration, a lookup table of the effective reflectance can be created, which is proportional to the portion of the light that reaches the detectors, or the mutual subtraction of the effective reflectance values of all possible combinations of the unknown optical parameters within certain search ranges of the sample. The experimentally measured results are compared with the lookup table, and optical properties, for example, the thicknesses and refractive indices of the thin film can be determined.
Public/Granted literature
- US20190183332A1 THIN FILM ANALYSIS APPARATUS AND METHOD FOR A CURVED SURFACE Public/Granted day:2019-06-20
Information query