Invention Grant
- Patent Title: Tungsten pentachloride conditioning and crystalline phase manipulation
-
Application No.: US15966924Application Date: 2018-04-30
-
Publication No.: US10710896B2Publication Date: 2020-07-14
- Inventor: Feng Li , Sonia Plaza , Jean-Marc Girard , Nicolas Blasco , Yumin Liu
- Applicant: L'Air Liquide, Société Anonyme pour l'Etude et l'Exploitation des Procédés Georges Claude
- Applicant Address: FR Paris
- Assignee: L'Air Liquide, Société Anonyme pour l'Etude et l'Exploitation des Procédés Georges Claude
- Current Assignee: L'Air Liquide, Société Anonyme pour l'Etude et l'Exploitation des Procédés Georges Claude
- Current Assignee Address: FR Paris
- Agent Patricia E. McQueeney; Allen E. White
- Main IPC: C01G41/04
- IPC: C01G41/04 ; C30B33/02 ; C30B35/00
Abstract:
Conditioning of tungsten pentachloride to form specific crystalline phases is disclosed. The specific crystalline phases permit stable vapor pressures over extended periods of time during vapor deposition and etching processes.
Public/Granted literature
- US20190330077A1 TUNGSTEN PENTACHLORIDE CONDITIONING AND CRYSTALLINE PHASE MANIPULATION Public/Granted day:2019-10-31
Information query
IPC分类:
