Invention Grant
- Patent Title: Vapor deposition mask and manufacturing method for organic EL display device
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Application No.: US15779102Application Date: 2017-01-26
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Publication No.: US10711338B2Publication Date: 2020-07-14
- Inventor: Shinichi Kawato , Manabu Niboshi , Eiji Koike , Satoshi Inoue , Tsuyoshi Inoue , Yuhki Kobayashi
- Applicant: Sharp Kabushiki Kaisha
- Applicant Address: JP Sakai
- Assignee: SHARP KABUSHIKI KAISHA
- Current Assignee: SHARP KABUSHIKI KAISHA
- Current Assignee Address: JP Sakai
- Agency: Keating & Bennett, LLP
- International Application: PCT/JP2017/002693 WO 20170126
- International Announcement: WO2018/138824 WO 20180802
- Main IPC: H01L51/56
- IPC: H01L51/56 ; C23C14/04 ; C23C14/24 ; H01L51/00

Abstract:
A vapor deposition mask including a metallic substrate provided with a plurality of openings for passing vapor deposition particles, wherein at least a portion of the plurality of openings are structured by one or more opening groups in which the plurality of openings are repeatedly arranged in accordance with a constant rule, and a plurality of protrusions of identical height are arranged to support the entire substrate from one side, and are provided only outside the opening group formation region.
Public/Granted literature
- US20190360086A1 VAPOR DEPOSITION MASK AND MANUFACTURING METHOD FOR ORGANIC EL DISPLAY DEVICE Public/Granted day:2019-11-28
Information query
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