- Patent Title: Baffle device for evaporation apparatus and evaporation apparatus
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Application No.: US15821065Application Date: 2017-11-22
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Publication No.: US10711340B2Publication Date: 2020-07-14
- Inventor: Da Zhou , Zailong Mo , Qun Ma
- Applicant: BOE TECHNOLOGY GROUP CO., LTD. , Chengdu BOE Optoelectronics Technology Co., Ltd
- Applicant Address: CN Beijing CN Chengdu, Sichuan Province
- Assignee: BOE TECHNOLOGY GROUP CO., LTD.,CHENGDU BOE OPTOELECTRONICS TECHNOLOGY CO., LTD.
- Current Assignee: BOE TECHNOLOGY GROUP CO., LTD.,CHENGDU BOE OPTOELECTRONICS TECHNOLOGY CO., LTD.
- Current Assignee Address: CN Beijing CN Chengdu, Sichuan Province
- Agency: Kinney & Lange, P.A.
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@37f4fc10
- Main IPC: C23C16/00
- IPC: C23C16/00 ; C23C14/24 ; B01F3/04 ; C23C14/54 ; H05B33/10

Abstract:
The present disclosure provides a baffle device for an evaporation apparatus and the evaporation apparatus. The baffle device includes a baffle assembly, configured to separate an evaporation ejection source from a substrate when the substrate is being switched in the evaporation apparatus; and at least one collection device, provided below the baffle assembly, and configured to collect evaporation material falling down from the baffle assembly.
Public/Granted literature
- US20180305804A1 BAFFLE DEVICE FOR EVAPORATION APPARATUS AND EVAPORATION APPARATUS Public/Granted day:2018-10-25
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