Invention Grant
- Patent Title: Uniform flow behavior in an electroplating cell
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Application No.: US15923873Application Date: 2018-03-16
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Publication No.: US10711364B2Publication Date: 2020-07-14
- Inventor: Daniel Mark Dinneen , Jingbin Feng
- Applicant: Lam Research Corporation
- Applicant Address: US CA Fremont
- Assignee: Lam Research Corporation
- Current Assignee: Lam Research Corporation
- Current Assignee Address: US CA Fremont
- Agency: Weaver Austin Villeneuve & Sampson LLP
- Main IPC: C25D17/00
- IPC: C25D17/00 ; H01L21/67 ; C25D7/12 ; C25D5/08 ; C25D17/06 ; C25D21/10 ; C25D21/12

Abstract:
Apparatuses and methods are provided for depositing a metal layer on a wafer. A secondary weir is positioned at a region below the primary weir such that overflowed plating solution over the primary weir during electroplating flows in a substantially azimuthally uniform manner. Methods are provided for electroplating wafers by increasing flow rate between wafer processes while plating solution flows over a primary weir, remains in contact with the overflowing plating solution, and flows onto the secondary weir such that overflow is substantially azimuthally uniform.
Public/Granted literature
- US20180202062A1 UNIFORM FLOW BEHAVIOR IN AN ELECTROPLATING CELL Public/Granted day:2018-07-19
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