Three-dimensional object inspecting device
Abstract:
A three-dimensional object inspecting device for inspecting a three-dimensional object includes a light source, a detector, an orientation information acquisition component, a three-dimensional shading corrector, and an inspection component. The light source emits light energy toward an inspection region set for the three-dimensional object. The detector detects radiant energy radiated from the inspection region. The orientation information acquisition component acquires orientation information about the light source and the detector with respect to the inspection region. The three-dimensional shading corrector performs three-dimensional shading correction on information corresponding to the radiant energy detected by the detector, based on shape information about the three-dimensional object in the inspection region, the orientation information, and shading correction information for a planar image detected by the detector for each of a plurality of working distances. The inspection component performs an inspection based on the information on which the three-dimensional shading correction has been performed.
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