Invention Grant
- Patent Title: Method of procuring an agglutinant structure and a method of manufacturing a pellicle including said agglutinant procuring method
-
Application No.: US15878460Application Date: 2018-01-24
-
Publication No.: US10712658B2Publication Date: 2020-07-14
- Inventor: Yuichi Hamada , Yu Yanase
- Applicant: SHIN-ETSU CHEMICAL CO., LTD.
- Applicant Address: JP Chiyoda-ku
- Assignee: SHIN-ETSU CHEMICAL CO., LTD.
- Current Assignee: SHIN-ETSU CHEMICAL CO., LTD.
- Current Assignee Address: JP Chiyoda-ku
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@3a708644
- Main IPC: G03F1/64
- IPC: G03F1/64 ; C09J133/04

Abstract:
There is provided a method for procuring an agglutinant structure or in particular an agglutinant layer, from an agglutinant material, which is laid on an end face of a pellicle frame for gluing the pellicle to a photomask, wherein the agglutinant material is processed into the agglutinant layer passing through one more stages wherein the material is under a helium gas atmosphere; the invention is also about a manufacturing method of a pellicle wherein the agglutinant layer is procured in the above described manner.
Public/Granted literature
Information query