Invention Grant
- Patent Title: Negative tone photosensitive compositions
-
Application No.: US15621059Application Date: 2017-06-13
-
Publication No.: US10712661B2Publication Date: 2020-07-14
- Inventor: Larry F Rhodes
- Applicant: PROMERUS, LLC
- Applicant Address: US OH Brecksville
- Assignee: PROMERUS, LLC
- Current Assignee: PROMERUS, LLC
- Current Assignee Address: US OH Brecksville
- Agent Balaram Gupta
- Main IPC: G03F7/025
- IPC: G03F7/025 ; G03F7/027 ; G03F7/028 ; G03F7/032 ; G03F7/40 ; G03F7/038 ; G03F7/033 ; G03F7/029 ; G03F7/32 ; C08F220/12 ; C08F220/26 ; G03F7/004

Abstract:
Various compositions encompassing polymers containing acidic pendent groups in combination with one or more reactive olefinic compounds and a photoacid generators form self-imagable negative tone films. Examples of such polymers include polymers and copolymers containing norbornene-type repeating units having acidic pendent groups, ring opened maleic anhydride polymers, polyacrylic acid, polyhydroxystyrene polymers, and the like. The films formed from such compositions provide self imagable, low-k, thermally stable layers for use in microelectronic and optoelectronic devices, among other applications.
Public/Granted literature
- US20170357156A1 NEGATIVE TONE PHOTOSENSITIVE COMPOSITIONS Public/Granted day:2017-12-14
Information query
IPC分类: