Invention Grant
- Patent Title: Plasma processing method
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Application No.: US16282828Application Date: 2019-02-22
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Publication No.: US10714318B2Publication Date: 2020-07-14
- Inventor: Toshifumi Nagaiwa
- Applicant: TOKYO ELECTRON LIMITED
- Applicant Address: JP Tokyo
- Assignee: TOKYO ELECTRON LIMITED
- Current Assignee: TOKYO ELECTRON LIMITED
- Current Assignee Address: JP Tokyo
- Agency: Rothwell, Figg, Ernst & Manbeck, P.C.
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@25810242
- Main IPC: H01L21/3065
- IPC: H01L21/3065 ; H01J37/32

Abstract:
In a plasma processing method, a position in height direction of an upper surface of a focus ring surrounding an edge of a substrate mounted on a supporting table in a chamber of a plasma processing apparatus is set such that the position in height direction of the upper surface of the focus ring mounted on a mounting region of the supporting table is lower than a reference position that is a position in a height direction of an upper surface of the substrate. Plasma is generated in the chamber to perform plasma processing on the substrate in a state where the position in the height direction of the upper surface of the focus ring is maintained. A negative DC voltage is applied to the focus ring in a state where the position in height direction of the upper surface of the focus ring is maintained during the plasma generation.
Public/Granted literature
- US20190267217A1 PLASMA PROCESSING METHOD Public/Granted day:2019-08-29
Information query
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