Invention Grant
- Patent Title: Optimizing junctions of gate all around structures with channel pull back
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Application No.: US16038985Application Date: 2018-07-18
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Publication No.: US10714392B2Publication Date: 2020-07-14
- Inventor: Nicolas Loubet , Emmanuel Augendre , Remi Coquand , Shay Reboh
- Applicant: International Business Machines Corporation , COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Michael J. Chang, LLC
- Agent Vazken Alexanian
- Main IPC: H01L21/8234
- IPC: H01L21/8234 ; H01L21/8238 ; H01L29/66 ; H01L29/06 ; H01L29/78 ; H01L29/423 ; H01L27/088 ; H01L21/3065 ; H01L21/306

Abstract:
Techniques for optimizing junctions of a gate-all-around nanosheet device are provided. In one aspect, a method of forming a nanosheet device includes: forming an alternating series of first/second nanosheets including a first/second material as a stack on a wafer; forming a dummy gate(s) on the stack; patterning the stack into a fin stack(s) beneath the dummy gate(s); etching the fin stack(s) to selectively pull back the second nanosheets in the fin stack(s) forming pockets in the fin stack(s); filling the pockets with a strain-inducing material; burying the dummy gate(s) in a dielectric material; selectively removing the dummy gate(s) forming a gate trench(es) in the dielectric material; selectively removing either the first nanosheets or the second nanosheets from the fin stack(s); and forming a replacement gate(s) in the gate trench(es). A nanosheet device is also provided.
Public/Granted literature
- US20200027791A1 Optimizing Junctions of Gate All Around Structures with Channel Pull Back Public/Granted day:2020-01-23
Information query
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