Invention Grant
- Patent Title: Thin film transistor, method for fabricating the same, and display device
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Application No.: US15783461Application Date: 2017-10-13
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Publication No.: US10714512B2Publication Date: 2020-07-14
- Inventor: Shuang Sun , Fangzhen Zhang
- Applicant: BOE Technology Group Co., Ltd.
- Applicant Address: CN Beijing
- Assignee: BOE TECHNOLOGY GROUP CO., LTD.
- Current Assignee: BOE TECHNOLOGY GROUP CO., LTD.
- Current Assignee Address: CN Beijing
- Agency: Arent Fox LLP
- Agent Michael Fainberg
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@63b84fb0
- Main IPC: H01L27/12
- IPC: H01L27/12 ; H01L29/786 ; H01L21/311 ; H01L21/3213 ; H01L29/66

Abstract:
The disclosure discloses a thin film transistor, a method for fabricating the same, and a display device so as to avoid a source and a drain from being oxidized while the thin film transistor is being fabricated, to thereby improve the performance of the thin film transistor. The method for fabricating a thin film transistor includes: forming an active layer pattern on a base substrate, and a source-drain metal layer located above the active layer pattern and with a same pattern as the active layer pattern, using one patterning process; forming a first insulation layer above the source-drain metal layer; and patterning the source-drain metal layer and the first insulation layer using one patterning process so that portion of the active layer pattern corresponding to a channel area is exposed to form a source pattern and a drain pattern.
Public/Granted literature
- US20180108688A1 THIN FILM TRANSISTOR, METHOD FOR FABRICATING THE SAME, AND DISPLAY DEVICE Public/Granted day:2018-04-19
Information query
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