Invention Grant
- Patent Title: Image sensor with shallow trench edge doping
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Application No.: US16578355Application Date: 2019-09-22
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Publication No.: US10714516B2Publication Date: 2020-07-14
- Inventor: Yueh-Chuan Lee , Chia-Chan Chen
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Eschweiler & Potashnik, LLC
- Main IPC: H01L29/47
- IPC: H01L29/47 ; H01L27/146 ; H01L21/02 ; H01L29/06

Abstract:
In some embodiments, the present disclosure relates to a method of forming an integrated chip. The method includes doping a substrate to form a first well region having a first doping type, and selectively etching an upper surface of the substrate to define a trench extending into the first well region. The trench is filled with one or more dielectric materials. The substrate is implanted to form a first photodiode region within the substrate. The first photodiode region is separated from the trench by the first well region. A first part of the one or more dielectric materials is removed from within the trench to expose a sidewall of the substrate that defines the trench and that is proximate to the first photodiode region. A doped epitaxial material having the first doping type is formed along the sidewall of the substrate.
Public/Granted literature
- US20200020727A1 IMAGE SENSOR WITH SHALLOW TRENCH EDGE DOPING Public/Granted day:2020-01-16
Information query
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