Invention Grant
- Patent Title: Nanosheet field-effect transistor with substrate isolation
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Application No.: US16185881Application Date: 2018-11-09
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Publication No.: US10714567B2Publication Date: 2020-07-14
- Inventor: Julien Frougier , Ruilong Xie
- Applicant: GLOBALFOUNDRIES Inc.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES INC.
- Current Assignee: GLOBALFOUNDRIES INC.
- Current Assignee Address: KY Grand Cayman
- Agency: Thompson Hine LLP
- Agent Yuanmin Cai
- Main IPC: H01L21/02
- IPC: H01L21/02 ; H01L29/06 ; H01L29/78

Abstract:
Structures for a field-effect transistor and methods of forming a structure for a field-effect transistor. A sacrificial layer is epitaxially grown on a bulk semiconductor substrate, a plurality of epitaxial semiconductor layers are epitaxially grown over the sacrificial layer, and the sacrificial layer and the plurality of epitaxial semiconductor layers are patterned to form a fin. A first portion of the first sacrificial layer is removed to form a first cavity arranged between the plurality of epitaxial semiconductor layers and the bulk semiconductor substrate, and a first dielectric material is deposited in the first cavity. A second portion of the first sacrificial layer, which is located adjacent to the first dielectric material in the first cavity, is removed to form a second cavity between the first fin and the bulk semiconductor substrate. A second dielectric material is deposited in the second cavity.
Public/Granted literature
- US20200152734A1 NANOSHEET FIELD-EFFECT TRANSISTOR WITH SUBSTRATE ISOLATION Public/Granted day:2020-05-14
Information query
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