Invention Grant
- Patent Title: Gate structure for a transistor device with a novel pillar structure positioned thereabove
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Application No.: US16777243Application Date: 2020-01-30
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Publication No.: US10714591B2Publication Date: 2020-07-14
- Inventor: Ruilong Xie , Youngtag Woo , Hui Zang
- Applicant: GLOBALFOUNDRIES Inc.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee Address: KY Grand Cayman
- Agency: Amerson Law Firm, PLLC
- Main IPC: H01L21/02
- IPC: H01L21/02 ; H01L29/66 ; H01L21/28 ; H01L29/49 ; H01L29/51 ; H01L21/8234 ; H01L21/311 ; H01L21/3105 ; H01L21/3213 ; H01L21/027

Abstract:
One illustrative transistor device disclosed herein includes a final gate structure that includes a gate insulation layer comprising a high-k material and a conductive gate, wherein the gate structure has an axial length in a direction that corresponds to a gate width direction of the transistor device. The device also includes a sidewall spacer contacting opposing lateral sidewalls of the final gate structure and a pillar structure (comprised of a pillar material) positioned above at least a portion of the final gate structure, wherein, when the pillar structure is viewed in a cross-section taken through the pillar structure in a direction that corresponds to the gate width direction of the transistor device, the pillar structure comprises an outer perimeter and wherein a layer of the high-k material is positioned around the entire outer perimeter of the pillar material.
Public/Granted literature
- US20200176587A1 NOVEL GATE STRUCTURE FOR A TRANSISTOR DEVICE WITH A NOVEL PILLAR STRUCTURE POSITIONED THEREABOVE Public/Granted day:2020-06-04
Information query
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