Invention Grant
- Patent Title: Semiconductor structure and methods for crystallizing metal oxide semiconductor layer
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Application No.: US16575576Application Date: 2019-09-19
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Publication No.: US10714631B2Publication Date: 2020-07-14
- Inventor: Jia-Hong Ye
- Applicant: AU OPTRONICS CORPORATION
- Applicant Address: TW Hsin-Chu
- Assignee: AU OPTRONICS CORPORATION
- Current Assignee: AU OPTRONICS CORPORATION
- Current Assignee Address: TW Hsin-Chu
- Agency: Locke Lord LLP
- Agent Tim Tingkang Xia, Esq.
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@7e24da41
- Main IPC: H01L29/786
- IPC: H01L29/786 ; H01L21/02 ; H01L29/24 ; H01L29/423 ; H01L29/66 ; H01L27/12

Abstract:
The present invention provides two methods for crystallizing a metal oxide semiconductor layer and a semiconductor structure. The first crystallization method is treating an amorphous metal oxide semiconductor layer including indium with oxygen at a pressure of about 550 mtorr to about 5000 mtorr and at a temperature of about 200° C. to about 750° C. The second crystallization method is, firstly, sequentially forming a first amorphous metal oxide semiconductor layer, an aluminum layer, and a second amorphous metal oxide semiconductor layer on a substrate, and, secondly, treating the first amorphous metal oxide semiconductor layer, the aluminum layer, and the second amorphous metal oxide semiconductor layer with an inert gas at a temperature of about 350° C. to about 650° C.
Public/Granted literature
- US20200013895A1 SEMICONDUCTOR STRUCTURE AND METHODS FOR CRYSTALLIZING METAL OXIDE SEMICONDUCTOR LAYER Public/Granted day:2020-01-09
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