Invention Grant
- Patent Title: Transparent ultraviolet photodetector
-
Application No.: US16590912Application Date: 2019-10-02
-
Publication No.: US10714649B2Publication Date: 2020-07-14
- Inventor: Damon Farmer , Shu-Jen Han
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee Address: US NY Armonk
- Agency: Cantor Colburn LLP
- Agent Vazken Alexanian
- Main IPC: H01L31/101
- IPC: H01L31/101 ; H01L31/0224 ; H01L31/18 ; H01L31/0296 ; H01L31/0352

Abstract:
A method of fabricating a visibly transparent, ultraviolet (UV) photodetector is provided. The method includes laying a first electrode onto a substrate surface, the first electrode being formed of a carbon-based, single-layer material. A block is patterned over an end of the first electrode and portions of the substrate surface. The block is formed of a visibly transparent material that is able to be deposited into the block at 75° C.-125° C. In addition, the method includes masking a section of the block and exposed sections of the first electrode. A second electrode is laid onto an unmasked section of the block with an end of the second electrode laid onto the substrate surface. The second electrode is formed of the carbon-based, single-layer material.
Public/Granted literature
- US20200035850A1 TRANSPARENT ULTRAVIOLET PHOTODETECTOR Public/Granted day:2020-01-30
Information query
IPC分类: