Invention Grant
- Patent Title: Piezoelectric device and method of fabricating the same
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Application No.: US15697692Application Date: 2017-09-07
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Publication No.: US10714675B2Publication Date: 2020-07-14
- Inventor: Yong Soo Cho , Chan Su Han
- Applicant: UNIVERSITY-INDUSTRY FOUNDATION (UIF), YONSEI UNIVERSITY
- Applicant Address: KR Seoul
- Assignee: UNIVERSITY-INDUSTRY FOUNDATION (UIF), YONSEI UNIVERSITY
- Current Assignee: UNIVERSITY-INDUSTRY FOUNDATION (UIF), YONSEI UNIVERSITY
- Current Assignee Address: KR Seoul
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@3dff3b96
- Main IPC: H01L41/08
- IPC: H01L41/08 ; H02N2/18 ; H01L41/047 ; H01L41/113 ; H01L41/314 ; H01L41/332 ; H01L41/187 ; H01L41/193
Abstract:
Provided are a piezoelectric device and a method of fabricating the same and the piezoelectric device may include a substrate including a 3-dimensional pattern surface layer; and a piezoelectric material layer, which is formed on the pattern surface layer and forms a 3-dimensional interface with the pattern surface layer.
Public/Granted literature
- US20180069167A1 PIEZOELECTRIC DEVICE AND METHOD OF FABRICATING THE SAME Public/Granted day:2018-03-08
Information query
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