Invention Grant
- Patent Title: Radiofrequency (RF) filter for multi-frequency RF bias
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Application No.: US15727516Application Date: 2017-10-06
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Publication No.: US10715095B2Publication Date: 2020-07-14
- Inventor: Maolin Long , Alex Paterson
- Applicant: Lam Research Corporation
- Applicant Address: US CA Fremont
- Assignee: Lam Research Corporation
- Current Assignee: Lam Research Corporation
- Current Assignee Address: US CA Fremont
- Agency: Penilla IP, APC
- Main IPC: H03H7/01
- IPC: H03H7/01 ; G01S13/00 ; H05B6/66

Abstract:
A radiofrequency (RF) filter includes an inductive element having multiple coil sections collectively forming an undivided coil of a cable of twisted magnetic wires. At least two adjacent coil sections have different turn pitches. The cable of twisted magnetic wires includes two wires per channel and is configured for at least one channel. The cable of twisted magnetic wires at a first end of the inductive element is configured for connection to an electrical component that is to receive power from a power supply. The cable of twisted magnetic wires at a second end of the inductive element is configured for connection to the power supply. Terminating capacitive elements are electrically connected between a reference ground potential and a respective wire of the cable of twisted magnetic wires at respective locations between the second end of the inductive element and the power supply.
Public/Granted literature
- US20190109576A1 Radiofrequency (RF) Filter for Multi-Frequency RF Bias Public/Granted day:2019-04-11
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