Invention Grant
- Patent Title: Metal contamination inhibitor, metal contamination inhibition membrane, method for preventing metal contamination, and method for cleaning product
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Application No.: US15760507Application Date: 2016-09-12
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Publication No.: US10717076B2Publication Date: 2020-07-21
- Inventor: Hiroshi Morita , Toshimasa Kato , Shigeyuki Hoshi
- Applicant: KURITA WATER INDUSTRIES LTD.
- Applicant Address: JP Tokyo
- Assignee: KURITA WATER INDUSTRIES LTD.
- Current Assignee: KURITA WATER INDUSTRIES LTD.
- Current Assignee Address: JP Tokyo
- Agent Manabu Kanesaka
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@54a549c4
- International Application: PCT/JP2016/076823 WO 20160912
- International Announcement: WO2017/056947 WO 20170406
- Main IPC: B01J39/04
- IPC: B01J39/04 ; H01L21/02 ; C02F1/44 ; C02F1/62 ; B01J47/12 ; C02F1/42 ; B01J41/04 ; H01L21/67 ; C02F101/20 ; C02F103/04

Abstract:
The present invention reduces adhesion of trace metals in ultrapure water for cleaning products, and inhibits the metal contamination of an object to be cleaned. Provided is a metal contamination inhibitor that contains a polymer having an ion-exchange group, such as a polystyrene sulfonate having a molecular weight of at least 100,000. Trace metals in ultrapure water are adsorbed through an ion-exchange reaction of the polymer having the ion-exchange group, and can thus be inhibited from adhering to products. Also provided is a method for cleaning a product with ultrapure water to which the metal contamination inhibitor has been added. Preferably, the ultrapure water to which the metal contamination inhibitor has been added flows through a separation membrane module, and the products are cleaned with permeated water.
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