Invention Grant
- Patent Title: Laser processing apparatus
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Application No.: US15839323Application Date: 2017-12-12
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Publication No.: US10717155B2Publication Date: 2020-07-21
- Inventor: Hiroshi Nomura
- Applicant: DISCO CORPORATION
- Applicant Address: JP Tokyo
- Assignee: DISCO CORPORATION
- Current Assignee: DISCO CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Greer Burns & Crain Ltd.
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@6eacb317
- Main IPC: B23K26/08
- IPC: B23K26/08 ; B23K26/0622 ; B23K26/364 ; B23K26/18 ; B23K26/40 ; H01L21/78 ; B23K103/00 ; B23K26/073 ; H01L21/67

Abstract:
A laser processing apparatus includes a cassette table for placing thereon a cassette in which a plurality of workpieces are accommodated, a carrying-out unit for carrying out the workpiece from the cassette placed on the cassette table, an X-axis direction moving unit for processing feed of a chuck table in the X-axis direction, a Y-axis direction moving unit for indexing feed of the chuck table in a Y-axis direction orthogonal to the X-axis direction, and a laser beam applying unit having a focusing unit for applying a laser beam to the workpiece held on the chuck table.
Public/Granted literature
- US20180161927A1 LASER PROCESSING APPARATUS Public/Granted day:2018-06-14
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