Integrated microfabricated vapor cell sensor with transparent body having two intersecting signal paths
Abstract:
An integrated microfabricated vapor cell sensor includes a transparent sensor cell body. The cell body has a cavity for a sensor fluid vapor which is covered by a first plate attached to the cell body. The sensor has a first signal path extending from a first signal emitter, through the cell body, through the cavity, through the cell body again, and to a first signal detector, and a second signal path extending through the cavity. The second signal path intersects the first signal path in the cavity. The second signal path may extend through the cell body, or may extend through the first plate. The signal emitters and signal detectors are located in the integrated microfabricated vapor cell sensor.
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