Invention Grant
- Patent Title: Method and system for quickly diagnosing, classifying, and sampling in-line defects based on CAA pre-diagnosis database
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Application No.: US16040598Application Date: 2018-07-20
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Publication No.: US10719655B2Publication Date: 2020-07-21
- Inventor: Iyun Leu
- Applicant: ELITE SEMICONDUCTOR, INC.
- Applicant Address: TW Hsinchu County
- Assignee: ELITE SEMICONDUCTOR, INC.
- Current Assignee: ELITE SEMICONDUCTOR, INC.
- Current Assignee Address: TW Hsinchu County
- Agency: Li & Cai Intellectual Property (USA) Office
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@3ce50d84
- Main IPC: G06F17/50
- IPC: G06F17/50 ; G06F30/398

Abstract:
The present disclosure provides a system and a method for quickly diagnosing, classifying, and sampling in-line defects based on a CAA pre-diagnosis database. The method includes the steps of obtaining a design layout of an object and a defect data of an important process stage of the object, obtaining a pre-diagnosis data group related to the design layout from a CAA pre-diagnosing database, and judging a killer defect index and a failure risk level of the defect data according to the pre-diagnosis data group.
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