Invention Grant
- Patent Title: Method and apparatus for determining a defocusing valve and for image-based determination of a dimensional size
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Application No.: US15439150Application Date: 2017-02-22
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Publication No.: US10719915B2Publication Date: 2020-07-21
- Inventor: Philipp Jester , Oliver Schwarz , Michael Totzeck , Matthias Barnert , Dirk Doering , Rainer Schmidt
- Applicant: CARL ZEISS INDUSTRIELLE MESSTECHNIK GMBH
- Applicant Address: DE Oberkochen
- Assignee: CARL ZEISS INDUSTRIELLE MESSTECHNIK GMBH
- Current Assignee: CARL ZEISS INDUSTRIELLE MESSTECHNIK GMBH
- Current Assignee Address: DE Oberkochen
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@2f951951
- Main IPC: G06T7/00
- IPC: G06T7/00 ; G06T5/00 ; G06T7/73
Abstract:
The invention relates to an apparatus and a method for determining a defocussing value (Δz, Δz1, Δz2) for at least one image feature in an image, wherein at least one monochromatic image of an object is generated, wherein the defocussing value (Δz, Δz1, Δz2) is determined on the basis of the image and depending on the wavelength (λ) of the monochromatic image, and a method and apparatus for image-based determination of a dimensional size.
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