Invention Grant
- Patent Title: Impedance matching network and method
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Application No.: US16843138Application Date: 2020-04-08
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Publication No.: US10720309B1Publication Date: 2020-07-21
- Inventor: Tomislav Lozic , Bala Kandampalayam , Michael Ulrich , Imran Bhutta , Ronald Decker
- Applicant: Reno Technologies, Inc.
- Applicant Address: US DE Wilmington
- Assignee: RENO TECHNOLOGIES, INC.
- Current Assignee: RENO TECHNOLOGIES, INC.
- Current Assignee Address: US DE Wilmington
- Agency: The Belles Group, P.C.
- Main IPC: H03H7/38
- IPC: H03H7/38 ; H01J37/32 ; H01L21/311 ; H01L21/285 ; H01L21/3213 ; H01L21/02 ; H01L21/67 ; H03H7/40

Abstract:
In one embodiment, the present disclosure is directed to a method for impedance matching. The RF source provides at least two repeating, non-zero pulse levels, including a high-priority pulse level and a low-priority pulse level. The matching network comprises at least one EVC, which comprises discrete capacitors configured to switch in and out to provide a plurality of match configurations. Each EVC has a switching limit comprising a predetermined number of switches in or out of the EVC's discrete capacitors in a prior time interval. Upon determining that switching to a new match configuration would cause an EVC to reach the switching limit, the method determines whether the new match configuration is for the low- or high-priority pulse level. If for the low-priority pulse level, the method prevents the switching of the EVC. If for the high-priority pulse level, the method switches the EVC to the new match configuration.
Public/Granted literature
- US20200234927A1 IMPEDANCE MATCHING NETWORK AND METHOD Public/Granted day:2020-07-23
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