- Patent Title: Method and a processing device for processing at least one carrier
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Application No.: US15695045Application Date: 2017-09-05
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Publication No.: US10720319B2Publication Date: 2020-07-21
- Inventor: Jens Tretner , Frank Patzig
- Applicant: Infineon Technologies AG
- Applicant Address: DE Neubiberg
- Assignee: Infineon Technologies AG
- Current Assignee: Infineon Technologies AG
- Current Assignee Address: DE Neubiberg
- Agency: Viering, Jentschura & Partner mbB
- Main IPC: H01L21/02
- IPC: H01L21/02 ; H01L21/67 ; B08B3/00 ; B08B3/02 ; B08B3/04

Abstract:
A processing device including: a chamber to accommodate at least one carrier in a processing region of the chamber, an inlet structure disposed over the chamber, the inlet structure providing a merging region fluidly connected to the processing region, a first liquid control arrangement coupled at least to the chamber, the first liquid control arrangement configured to provide a first liquid in the processing region of the chamber and to raise a level of the first liquid into the merging region of the inlet structure, and a second liquid control arrangement coupled to the inlet structure, the second liquid control arrangement configured to introduce a second liquid in the merging region, wherein the first liquid control arrangement is further configured to drain the first liquid from the chamber to form a continuous surface layer of the second liquid on the first liquid and to expose the at least one carrier.
Public/Granted literature
- US20170365460A1 METHOD AND A PROCESSING DEVICE FOR PROCESSING AT LEAST ONE CARRIER Public/Granted day:2017-12-21
Information query
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