Invention Grant
- Patent Title: Method for growing GaN crystal and C-plane GaN substrate
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Application No.: US16270454Application Date: 2019-02-07
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Publication No.: US10720326B2Publication Date: 2020-07-21
- Inventor: Yutaka Mikawa , Hideo Fujisawa , Tae Mochizuki , Hideo Namita , Shinichiro Kawabata
- Applicant: MITSUBISHI CHEMICAL CORPORATION
- Applicant Address: JP Tokyo
- Assignee: MITSUBISHI CHEMICAL CORPORATION
- Current Assignee: MITSUBISHI CHEMICAL CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Leason Ellis LLP
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@52cfb060
- Main IPC: H01L21/02
- IPC: H01L21/02 ; C30B29/40 ; C30B33/06 ; C30B29/38 ; C30B7/10

Abstract:
A method for growing a GaN crystal suitable as a material of GaN substrates including C-plane GaN substrates includes: a first step of preparing a GaN seed having a nitrogen polar surface; a second step of arranging a pattern mask on the nitrogen polar surface of the GaN seed, the pattern mask being provided with a periodical opening pattern comprising linear openings and including intersections, the pattern mask being arranged such that longitudinal directions of at least part of the linear openings are within ±3° from a direction of an intersection line between the nitrogen polar surface and an M-plane; and a third step of ammonothermally growing a GaN crystal through the pattern mask such that a gap is formed between the GaN crystal and the pattern mask.
Public/Granted literature
- US20190189439A1 METHOD FOR GROWING GaN CRYSTAL AND C-PLANE GaN SUBSTRATE Public/Granted day:2019-06-20
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