Invention Grant
- Patent Title: Sheet expanding apparatus
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Application No.: US16215745Application Date: 2018-12-11
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Publication No.: US10720347B2Publication Date: 2020-07-21
- Inventor: Shinichi Fujisawa
- Applicant: DISCO CORPORATION
- Applicant Address: JP Tokyo
- Assignee: DISCO CORPORATION
- Current Assignee: DISCO CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Greer Burns & Crain, Ltd.
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@526b2f5
- Main IPC: H01L21/67
- IPC: H01L21/67 ; H01L21/687 ; H01L21/683 ; B32B38/00

Abstract:
A sheet expanding apparatus includes: an adhering mechanism including an adhering roller by which a belt-shaped sheet wound in a roll form is adhered to a plate-shaped body, and a cutter adapted to cut the belt-shaped sheet into a rectangular sheet larger in size than the plate-shaped body; an expanding mechanism adapted to expand the rectangular sheet in a first direction and a second direction; and a transfer unit by which the plate-shaped body having the rectangular sheet adhered thereto is transferred to the expanding mechanism. The belt-shaped sheet can be supplied to the sheet expanding apparatus in the state of being wound in the roll form, and the plate-shaped body can be transferred by the transfer unit and the rectangular sheet can be expanded, after the belt-shaped sheet is adhered to the plate-shaped body and is cut into the rectangular sheet in the sheet expanding apparatus.
Public/Granted literature
- US20190189476A1 SHEET EXPANDING APPARATUS Public/Granted day:2019-06-20
Information query
IPC分类: