Invention Grant
- Patent Title: Wafer storage container
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Application No.: US15079632Application Date: 2016-03-24
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Publication No.: US10720352B2Publication Date: 2020-07-21
- Inventor: Bum Je Woo , Seok Mun Yoon , Myoung Sok Han , Hyun Sin Kim
- Applicant: Pico & Tera Co., Ltd. , Bum Je Woo
- Applicant Address: KR Suwon KR Seongnam
- Assignee: PICO & TERA CO., LTD.,Bum Je Woo
- Current Assignee: PICO & TERA CO., LTD.,Bum Je Woo
- Current Assignee Address: KR Suwon KR Seongnam
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@53fc747d
- Main IPC: H01L21/677
- IPC: H01L21/677 ; H01L21/673

Abstract:
The present invention relates to a wafer storage container, more particularly, relates to a wafer storage container wherein the space of the wafer storage container is divided into the spaces, namely a storage room, a gas injection room, and a gas exhausting room, which are independent and separate from each other, so when the wafer storage container is transported to the load port and being coupled therewith, the purge gas is injected/exhausted through the separating walls inside the storage room, thereby efficiently removing the remaining fumes on the surface of the wafer.
Public/Granted literature
- US20160284580A1 WAFER STORAGE CONTAINER Public/Granted day:2016-09-29
Information query
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