Invention Grant
- Patent Title: Three-dimensional semiconductor memory device
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Application No.: US15988745Application Date: 2018-05-24
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Publication No.: US10720441B2Publication Date: 2020-07-21
- Inventor: Hee-Sung Kam , TaeHee Lee , Kyoung-Hoon Kim
- Applicant: SAMSUNG ELECTRONICS CO., LTD.
- Applicant Address: KR Suwon-si
- Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee Address: KR Suwon-si
- Agency: Sughrue Mion, PLLC
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@5432ad7c
- Main IPC: H01L21/82
- IPC: H01L21/82 ; H01L27/11582 ; G11C16/08 ; H01L27/11573 ; H01L27/1157 ; H01L27/11565 ; G11C16/04

Abstract:
Provided is a three-dimensional semiconductor memory device. The device may include a substrate that includes a cell array region and a connection region; an electrode structure provided on the substrate to extend in a first direction and include electrodes that are vertically stacked on the substrate and include pad portions which are stacked on the connection region to have a staircase structure; cell vertical structures provided on the cell array region to penetrate the electrode structure; dummy vertical structures provided on the connection region to penetrate the pad portion of each electrode; and cell contact plugs coupled to the pad portions of the electrodes. Each cell contact plug may have a non-circular top surface, and the dummy vertical structures may be arranged to surround each cell contact plug, in a plan view.
Public/Granted literature
- US20190157291A1 THREE-DIMENSIONAL SEMICONDUCTOR MEMORY DEVICE Public/Granted day:2019-05-23
Information query
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