Invention Grant
- Patent Title: Backside illuminated image sensor with three-dimensional transistor structure and forming method thereof
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Application No.: US15752212Application Date: 2016-04-07
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Publication No.: US10720463B2Publication Date: 2020-07-21
- Inventor: Lixin Zhao , Wenqiang Li , Yonggang Wang , Jie Li
- Applicant: GALAXYCORE SHANGHAI LIMITED CORPORATION
- Applicant Address: CN Shanghai
- Assignee: GALAXYCORE SHANGHAI LIMITED CORPORATION
- Current Assignee: GALAXYCORE SHANGHAI LIMITED CORPORATION
- Current Assignee Address: CN Shanghai
- Agency: Fenwick & West LLP
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@6b790fef
- International Application: PCT/CN2016/078738 WO 20160407
- International Announcement: WO2017/028546 WO 20170223
- Main IPC: H01L27/146
- IPC: H01L27/146 ; H01L29/768

Abstract:
A method for forming a backside illuminated image sensor with a three-dimensional transistor structure is provided, where forming a gate of the three-dimensional transistor structure includes: forming a source follower transistor and/or a reset transistor with a three-dimensional transistor structure, wherein the source follower transistor and/or the reset transistor correspond to a protruding structure; and forming an insulating sidewall around the protruding structure, forming a groove between the insulating sidewall and a channel region of a transistor corresponding to the protruding structure, and forming a gate of the transistor in the groove, wherein the gate of the transistor is isolated by the insulating sidewall.
Public/Granted literature
- US20200135777A1 BACKSIDE ILLUMINATED IMAGE SENSOR WITH THREE-DIMENSIONAL TRANSISTOR STRUCTURE AND FORMING METHOD THEREOF Public/Granted day:2020-04-30
Information query
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