Invention Grant
- Patent Title: Variable resistance memory devices
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Application No.: US16277385Application Date: 2019-02-15
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Publication No.: US10720470B2Publication Date: 2020-07-21
- Inventor: Byongju Kim , Young-min Ko , Jong-uk Kim , Kwangmin Park , Jeong-hee Park
- Applicant: Samsung Electronics Co., Ltd.
- Applicant Address: KR
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR
- Agency: Myers Bigel, P.A.
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@13800939
- Main IPC: H01L27/24
- IPC: H01L27/24 ; H01L45/00 ; H01F10/32 ; H01L43/02 ; H01L43/12 ; H01L27/22 ; H01L43/10

Abstract:
There is provided a variable resistance memory device including a first electrode line layer including first electrode lines extending in a first direction and spaced apart from each other on a substrate, a second electrode line layer that is above the first electrode line layer and including second electrode lines extending in a second direction orthogonal to the first direction and spaced apart from each other, and a memory cell layer including memory cells between the first electrode line layer and the second electrode line layer. Each of the memory cells includes a selection device layer, an intermediate electrode layer, and a variable resistance layer. A first insulating layer is between the first electrode lines, a second insulating layer is between the memory cells, and a third insulating layer is between the second electrode lines. The second insulating layer includes air gaps on side surfaces of the memory cells.
Public/Granted literature
- US20200052038A1 VARIABLE RESISTANCE MEMORY DEVICES Public/Granted day:2020-02-13
Information query
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