Invention Grant
- Patent Title: Structure and formation method of semiconductor device with magnetic element
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Application No.: US16260439Application Date: 2019-01-29
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Publication No.: US10720487B2Publication Date: 2020-07-21
- Inventor: Chin-Yu Ku , Chi-Cheng Chen , Hon-Lin Huang , Wei-Li Huang , Chun-Yi Wu , Chen-Shien Chen
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsinchu
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsinchu
- Agency: Birch, Stewart, Kolasch & Birch, LLP
- Main IPC: H01L49/02
- IPC: H01L49/02

Abstract:
A structure and a formation method of a semiconductor device are provided. The method includes forming an etch stop layer over a semiconductor substrate and forming a magnetic element over the etch stop layer. The method also includes forming an isolation element extending across the magnetic element. The isolation element partially covers the top surface of the magnetic element and partially covers sidewall surfaces of the magnetic element. The method further includes forming a conductive line over the isolation element. In addition, the method includes forming a dielectric layer over the conductive line, the isolation element, and the magnetic element.
Public/Granted literature
- US20200006465A1 STRUCTURE AND FORMATION METHOD OF SEMICONDUCTOR DEVICE WITH MAGNETIC ELEMENT Public/Granted day:2020-01-02
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