Invention Grant
- Patent Title: Enhancement mode gallium nitride based transistor device and manufacturing method thereof
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Application No.: US16359345Application Date: 2019-03-20
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Publication No.: US10720521B2Publication Date: 2020-07-21
- Inventor: Jung-Tse Tsai , Po-Chun Yeh , Chien-Hua Hsu , Po-Tsung Tu
- Applicant: Industrial Technology Research Institute
- Applicant Address: TW Hsin-Chu
- Assignee: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE
- Current Assignee: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE
- Current Assignee Address: TW Hsin-Chu
- Agency: WPAT, PC
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@6a69cc9b
- Main IPC: H01L21/338
- IPC: H01L21/338 ; H01L29/66 ; H01L29/778 ; H01L29/20 ; H01L29/12

Abstract:
An enhancement mode GaN transistor is provided, which includes a GaN layer, a quantum well structure, a gate, a source a drain and a first barrier layer. The quantum well structure is disposed on the upper surface of the GaN layer. The gate is disposed on the quantum well structure. The source is disposed on one end of the upper surface of the GaN layer. The drain is disposed on the other end of the upper surface of the GaN layer. The first barrier layer is disposed on the upper surface of the GaN layer and extends to the lateral surfaces of the quantum well structure.
Public/Granted literature
- US20200168728A1 ENHANCEMENT MODE GALLIUM NITRIDE BASED TRANSISTOR DEVICE AND MANUFACTURING METHOD THEREOF Public/Granted day:2020-05-28
Information query
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