Invention Grant
- Patent Title: Photodetector
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Application No.: US15751795Application Date: 2016-08-28
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Publication No.: US10720543B2Publication Date: 2020-07-21
- Inventor: Hiroshi Fukuda , Shin Kamei , Ken Tsuzuki , Makoto Jizodo , Kiyofumi Kikuchi
- Applicant: Nippon Telegraph and Telephone Corporation
- Applicant Address: JP Tokyo
- Assignee: NIPPON TELEGRAPH AND TELEPHONE CORPORATION
- Current Assignee: NIPPON TELEGRAPH AND TELEPHONE CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Workman Nydegger
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@75d235f1
- International Application: PCT/JP2016/003907 WO 20160828
- International Announcement: WO2017/038072 WO 20170309
- Main IPC: H01L31/102
- IPC: H01L31/102 ; H01L31/105 ; H01L31/0224 ; H01L31/0352 ; H01L31/028 ; H01L31/0232 ; H01L31/0264

Abstract:
A germanium photodetector which reduces a dark current without degradation of a photocurrent includes: a silicon substrate; a lower clad layer formed on the silicon substrate; a core layer formed on the lower clad layer; a p-type silicon slab formed in a part of the core layer and doped with a p-type impurity ion; p++ silicon electrode sections that are highly-doped with a p-type impurity and act as an electrode; and germanium layers which absorb light. The germanium photodetector further includes an upper clad layer, an n-type germanium region doped with an n-type impurity above the germanium layer, and an electrode. According to the present invention, two germanium layers are provided on the p-type silicon slab so as to miniaturize the area of the surface of the individual germanium layer in contact with the p-type silicon slab, so that the dark current due to threading dislocation can be reduced.
Public/Granted literature
- US20180233618A1 PHOTODETECTOR Public/Granted day:2018-08-16
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