Invention Grant
- Patent Title: Prevention of switching of spins in magnetic tunnel junctions by on-chip parasitic magnetic shield
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Application No.: US15972423Application Date: 2018-05-07
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Publication No.: US10720567B2Publication Date: 2020-07-21
- Inventor: Benjamin D. Briggs , Lawrence A. Clevenger , Nicholas A. Lanzillo , Michael Rizzolo , Theodorus E. Standaert
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Michael J. Chang, LLC
- Agent Vazken Alexanian
- Main IPC: H01L43/02
- IPC: H01L43/02 ; H01L43/12 ; H01L43/10 ; H01L43/08

Abstract:
Techniques for preventing switching of spins in a magnetic tunnel junction by stray magnetic fields using a thin film magnetic shield are provided. In one aspect, a method of forming a magnetic tunnel junction includes: forming a stack on a substrate, having a first magnetic layer, a tunnel barrier, and a second magnetic layer; etching the stack to partially pattern the magnetic tunnel junction in the stack, wherein the etching includes patterning the magnetic tunnel junction through the second magnetic layer, the tunnel barrier, and partway through the first magnetic layer; depositing a first spacer and a magnetic shield film onto the partially patterned magnetic tunnel junction; etching back the magnetic shield film and first spacer; complete etching of the magnetic tunnel junction through the first magnetic layer to form a fully patterned magnetic tunnel junction; and depositing a second spacer onto the fully patterned magnetic tunnel junction.
Public/Granted literature
- US20180269383A1 Prevention of Switching of Spins in Magnetic Tunnel Junctions by On-Chip Parasitic Magnetic Shield Public/Granted day:2018-09-20
Information query
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