Invention Grant
- Patent Title: Barrier layer for resistive random access memory
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Application No.: US16229345Application Date: 2018-12-21
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Publication No.: US10720581B2Publication Date: 2020-07-21
- Inventor: Tzu Chung Tsai , Yan-Chi Chen , Hsia-Wei Chen
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsinchu
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsinchu
- Agency: Sterne, Kessler, Goldstein & Fox P.L.L.C.
- Main IPC: H01L45/00
- IPC: H01L45/00

Abstract:
The present disclosure is directed to resistive random access memory (RRAM) structures with a bottom electrode barrier stack. For example, the RRAM structure includes: (i) a bottom electrode having a conductive material and a layer stack, where the layer stack covers a bottom surface and a side surface of the conductive material and is interposed between the conductive material and an underlying conductive structure; (ii) a resistance-switching layer that is disposed on the bottom electrode and opposite to the conductive structure; and (iii) a top electrode that is disposed on the resistance-switching layer.
Public/Granted literature
- US20200136039A1 BARRIER LAYER FOR RESISTIVE RANDOM ACCESS MEMORY Public/Granted day:2020-04-30
Information query
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