Invention Grant
- Patent Title: Etchant and method of manufacturing display device by using the same
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Application No.: US16157054Application Date: 2018-10-10
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Publication No.: US10723946B2Publication Date: 2020-07-28
- Inventor: Jonghee Park , Kitae Kim , Jinseock Kim , Beomsoo Kim , Sangtae Kim , Kyungbo Shim , Giyong Nam , Youngjin Yoon , Daesung Lim
- Applicant: Samsung Display Co., Ltd. , Dongwoo Fine-Chem Co., Ltd.
- Applicant Address: KR Yongin-si KR Iksan-si
- Assignee: Samsung Display Co., Ltd..,Dongwoo Fine-Chem Co., Ltd.
- Current Assignee: Samsung Display Co., Ltd..,Dongwoo Fine-Chem Co., Ltd.
- Current Assignee Address: KR Yongin-si KR Iksan-si
- Agency: Lewis Roca Rothgerber Christie LLP
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@38ab32f0
- Main IPC: C09K13/06
- IPC: C09K13/06 ; H01L27/12 ; H01L51/52 ; H01L51/56 ; H01L51/00 ; H01L27/32

Abstract:
An etchant includes: based on a total weight of the etchant, about 1 wt % to about 15 wt % of sulfurized peroxide, about 5 wt % to about 10 wt % of nitric acid, about 20 wt % to about 40 wt % of organic acid, about 0.05 wt % to about 5 wt % of ferric nitrate, about 0.1 wt % to about 5 wt % of ionic sequestrant, and 0.1 wt % to 5 wt % of corrosion inhibitor, wherein a remaining amount is deionized water.
Public/Granted literature
- US20190153318A1 ETCHANT AND METHOD OF MANUFACTURING DISPLAY DEVICE BY USING THE SAME Public/Granted day:2019-05-23
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