Invention Grant
- Patent Title: Device of manufacturing silicon carbide single crystal
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Application No.: US14834539Application Date: 2015-08-25
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Publication No.: US10724151B2Publication Date: 2020-07-28
- Inventor: Tsutomu Hori , Shin Harada
- Applicant: SUMITOMO ELECTRIC INDUSTRIES, LTD.
- Applicant Address: JP Osaka-shi, Osaka
- Assignee: Sumitomo Electric Industries, Ltd.
- Current Assignee: Sumitomo Electric Industries, Ltd.
- Current Assignee Address: JP Osaka-shi, Osaka
- Agency: Faegre Drinker Biddle & Reath LLP
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@2290e3ef com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@43a8cd41
- Main IPC: C30B23/06
- IPC: C30B23/06 ; C30B29/36

Abstract:
A device of manufacturing a silicon carbide single crystal includes a crucible, a first resistive heater, a second resistive heater, and a first support portion. The crucible has a top surface, a bottom surface opposite to the top surface, and a tubular side surface located between the top surface and the bottom surface. The first resistive heater is disposed to face the bottom surface. The second resistive heater is provided to surround the side surface. The first support portion supports the crucible such that the bottom surface is separated from the first resistive heater, and the side surface is separated from the second resistive heater. The first support portion is in contact with at least one of the top surface and the side surface.
Public/Granted literature
- US20160122903A1 DEVICE OF MANUFACTURING SILICON CARBIDE SINGLE CRYSTAL Public/Granted day:2016-05-05
Information query
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