Invention Grant
- Patent Title: Displacement measuring apparatus
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Application No.: US16601604Application Date: 2019-10-15
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Publication No.: US10724849B2Publication Date: 2020-07-28
- Inventor: Masakazu Nishiki
- Applicant: Keyence Corporation
- Applicant Address: JP Osaka
- Assignee: Keyence Corporation
- Current Assignee: Keyence Corporation
- Current Assignee Address: JP Osaka
- Agency: Kilyk & Bowersox, P.L.L.C.
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@35acfbd9
- Main IPC: G01B11/06
- IPC: G01B11/06 ; G01B11/14 ; G01B11/25 ; G02B26/10 ; G02B26/08 ; G06T7/70 ; G03B21/53 ; G03B21/14

Abstract:
To enable measuring a displacement at a predetermined position of a measurement object for a short time at a high accuracy. While a scanning mirror is moved in a first scanning range to cause measurement light to irradiate a measurement position, a first irradiation angle of the scanning mirror at the time the measurement light is emitted to the measurement position is obtained. While a scanning mirror is moved in a second scanning range that covers the first irradiation angle and that is narrower than the first scanning range, and a second irradiation angle at the time the measurement light is emitted to the measurement position is obtained. A light receiver outputs a received-light quantity distribution, and a displacement at the measurement position is measured on the basis of the second irradiation angle and the position in a second direction of the measurement position.
Public/Granted literature
- US20200149873A1 Displacement Measuring Apparatus Public/Granted day:2020-05-14
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