Invention Grant
- Patent Title: Inspection apparatus and inspection method
-
Application No.: US15687924Application Date: 2017-08-28
-
Publication No.: US10724942B2Publication Date: 2020-07-28
- Inventor: Masato Akita , Takamitsu Sunaoshi , Misato Ishikawa
- Applicant: Kabushiki Kaisha Toshiba
- Applicant Address: JP Minato-ku
- Assignee: Kabushiki Kaisha Toshiba
- Current Assignee: Kabushiki Kaisha Toshiba
- Current Assignee Address: JP Minato-ku
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@2641c279
- Main IPC: G01N21/13
- IPC: G01N21/13 ; B07C5/36 ; G01N35/00 ; G01N21/07

Abstract:
According to one embodiment, an inspection apparatus includes a socket, a first arm, and a recognition device. The socket has at least one container holding part for holding a container containing an object. The first arm includes at least two links of which ends are connected. The first arm is able to install the container into the container holding part when the links are in a first posture and to reinstall the container into the container holding part when the links are in a second posture different from the first posture. The recognition device obtains at least recognition results indicating respective positions of the object when the container is installed into the container holding part in the first posture and the second posture.
Public/Granted literature
- US20180231456A1 INSPECTION APPARATUS AND INSPECTION METHOD Public/Granted day:2018-08-16
Information query