Invention Grant
- Patent Title: Inspection system and inspection method
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Application No.: US15129273Application Date: 2015-03-31
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Publication No.: US10724960B2Publication Date: 2020-07-28
- Inventor: Toru Kurihara , Shigeru Ando , Michihiko Yoshimura
- Applicant: The University of Tokyo , RICOH ELEMEX CORPORATION
- Applicant Address: JP Tokyo JP Aichi JP Koichi
- Assignee: The University of Tokyo,Ricoh Elemex Corporation,Kochi Prefectural Public University Corporation
- Current Assignee: The University of Tokyo,Ricoh Elemex Corporation,Kochi Prefectural Public University Corporation
- Current Assignee Address: JP Tokyo JP Aichi JP Koichi
- Agency: McDermott Will & Emery LLP
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@30d8158b
- International Application: PCT/JP2015/060277 WO 20150331
- International Announcement: WO2015/152307 WO 20151008
- Main IPC: G01N21/88
- IPC: G01N21/88

Abstract:
An inspection system of an embodiment includes: a planar illumination unit that temporally varies an intensity of light in a periodic manner by spatially moving a stripe pattern of the intensity of light; a time-correlation image generator that generates a time-correlation image with a time-correlation camera or an image capturing system that performs an operation equivalent to that of the time-correlation camera; and a calculation processor that calculates a characteristic from the time-correlation image, the characteristic corresponding to a distribution of normal vectors to an inspection target surface and serving to detect an abnormality based on at least either a difference from a surrounding area or a difference from a reference surface.
Public/Granted literature
- US20170115230A1 INSPECTION SYSTEM AND INSPECTION METHOD Public/Granted day:2017-04-27
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