Invention Grant
- Patent Title: Device and method for measuring electric field by using MOS capacitor
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Application No.: US15647755Application Date: 2017-07-12
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Publication No.: US10725082B2Publication Date: 2020-07-28
- Inventor: Sang Lyul Min , Yong Hun Lee
- Applicant: SNU R&DB FOUNDATION
- Applicant Address: KR Seoul
- Assignee: SNU R&DB FOUNDATION
- Current Assignee: SNU R&DB FOUNDATION
- Current Assignee Address: KR Seoul
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@7748b580
- Main IPC: G01R29/12
- IPC: G01R29/12 ; G01R29/08 ; G01R15/16 ; G01R29/24 ; H01L27/02

Abstract:
One embodiment provides a technique of adjusting a gate voltage to be applied to at least one MOS capacitor and an amount of electric charges to be stored in the MOS capacitor so as to determine a sensitivity of a change in the amount of electric charges stored in the MOS capacitor, and exposing the MOS capacitor to an electric filed for a predetermined amount of time and then reading an electron inflow or outflow result due to the electric field so as to interpret the intensity and the direction of the electric field, thereby measuring the intensity and the direction of the electric field.
Public/Granted literature
- US20180003757A1 DEVICE AND METHOD FOR MEASURING ELECTRIC FIELD BY USING MOS CAPACITOR Public/Granted day:2018-01-04
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