Invention Grant
- Patent Title: Integrated piezoelectric microelectromechanical ultrasound transducer (PMUT) on integrated circuit (IC) for fingerprint sensing
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Application No.: US15853396Application Date: 2017-12-22
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Publication No.: US10726231B2Publication Date: 2020-07-28
- Inventor: Julius Ming-Lin Tsai , Mike Daneman , Sanjiv Kapoor
- Applicant: INVENSENSE, INC.
- Applicant Address: US CA San Jose
- Assignee: INVENSENSE, INC.
- Current Assignee: INVENSENSE, INC.
- Current Assignee Address: US CA San Jose
- Agency: Amin, Turocy & Watson, LLP
- Main IPC: G06K9/00
- IPC: G06K9/00 ; B06B1/06 ; B81B7/00 ; B81C1/00 ; G01H11/08
Abstract:
Microelectromechanical (MEMS) devices and associated methods are disclosed. Piezoelectric MEMS transducers (PMUTs) suitable for integration with complementary metal oxide semiconductor (CMOS) integrated circuit (IC), as well as PMUT arrays having high fill factor for fingerprint sensing, are described.
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