Invention Grant
- Patent Title: Semiconductor device and manufacturing method therefor
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Application No.: US15592241Application Date: 2017-05-11
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Publication No.: US10727105B2Publication Date: 2020-07-28
- Inventor: Tsuyoshi Kachi , Yoshinori Hoshino , Senichirou Nagase
- Applicant: Renesas Electronics Corporation
- Applicant Address: JP Tokyo
- Assignee: RENSAS ELECTRONICS CORPORATION
- Current Assignee: RENSAS ELECTRONICS CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Mattingly & Malur, PC
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@1d0b14e8
- Main IPC: H01L21/762
- IPC: H01L21/762 ; H01L21/265 ; H01L29/423 ; H01L29/06 ; H01L29/861 ; H01L29/66 ; H01L29/15 ; H01L29/739 ; H01L29/78

Abstract:
Provided are a semiconductor device and a manufacturing method therefor that can prevent the breakage of an element and in which the control of impurity amounts is less susceptible to variations in manufacturing processes. A semiconductor substrate has a front surface and includes hole portions extending from the front surface to an inside of the substrate. N-type regions are formed in the semiconductor substrate. At wall surfaces of the hole portions, p-type regions are formed to configure p-n junction with the n-type regions. Each of the p-type regions includes a low-concentration region and a high-concentration region formed at the wall surface of each hole portion. A width of the high-concentration region along the wall surface of the hole portion becomes smaller from the front surface toward a deeper position.
Public/Granted literature
- US20180019160A1 SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREFOR Public/Granted day:2018-01-18
Information query
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