Invention Grant
- Patent Title: Integrated gate contact and cross-coupling contact formation
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Application No.: US16185675Application Date: 2018-11-09
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Publication No.: US10727136B2Publication Date: 2020-07-28
- Inventor: Hui Zang , Ruilong Xie , Chanro Park , Laertis Economikos
- Applicant: GLOBALFOUNDRIES Inc.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES INC.
- Current Assignee: GLOBALFOUNDRIES INC.
- Current Assignee Address: KY Grand Cayman
- Agency: Thompson Hine LLP
- Agent Francois Pagette
- Main IPC: H01L21/336
- IPC: H01L21/336 ; H01L21/8234 ; H01L29/78 ; H01L29/40 ; H01L29/423 ; H01L21/768 ; H01L29/417

Abstract:
Methods of forming cross-coupling contacts for field-effect transistors and structures for field effect-transistors that include cross-coupling contacts. A dielectric cap is formed over a gate structure and a sidewall spacer adjacent to a sidewall of the gate structure. A portion of the dielectric cap is removed from over the sidewall spacer and the gate structure to expose a first portion of the gate electrode of the gate structure at a top surface of the gate structure. The sidewall spacer is then recessed relative to the gate structure to expose a portion of the gate dielectric layer at the sidewall of the gate structure, which is removed to expose a second portion of the gate electrode of the gate structure. A cross-coupling contact is formed that connects the first and second portions of the gate electrode of the gate structure with an epitaxial semiconductor layer adjacent to the sidewall spacer.
Public/Granted literature
- US20200152518A1 INTEGRATED GATE CONTACT AND CROSS-COUPLING CONTACT FORMATION Public/Granted day:2020-05-14
Information query
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