Invention Grant
- Patent Title: Interconnect bump structures for photo detectors
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Application No.: US16129402Application Date: 2018-09-12
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Publication No.: US10727267B2Publication Date: 2020-07-28
- Inventor: Wei Zhang , Douglas Stewart Malchow , Michael J. Evans , Wei Huang , Paul L. Bereznycky , Namwoong Paik
- Applicant: Sensors Unlimited, Inc.
- Applicant Address: US NJ Princeton
- Assignee: Sensors Unlimited, Inc.
- Current Assignee: Sensors Unlimited, Inc.
- Current Assignee Address: US NJ Princeton
- Agency: Locke Lord LLP
- Agent Scott D. Wofsy; Joshua L. Jones
- Main IPC: H01L27/146
- IPC: H01L27/146 ; H01L25/16 ; H01L23/488 ; H01L23/00

Abstract:
A method of assembling a photodetector assembly includes depositing bumps on a read out integrated circuit (ROIC) without depositing bumps on a photodiode array (PDA). The method includes assembling the PDA and ROIC together wherein each bump electrically interconnects the ROIC with a respective contact of the PDA. A photodetector assembly includes a PDA. A ROIC is assembled to the PDA, wherein the ROIC is electrically interconnected with the PDA through a plurality of electrically conductive bumps. Each bump is confined within a respective pocket between the ROIC and a respective contact of the PDA. The disclosed methods can enable focal plane array manufacturers to achieve low-cost production of ultra-fine pitch, large format imaging arrays.
Public/Granted literature
- US20200083272A1 INTERCONNECT BUMP STRUCTURES FOR PHOTO DETECTORS Public/Granted day:2020-03-12
Information query
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